CMP and Semiconductor Polishing Pads

Spartan is renowned for our extensive range of CMP and semiconductor polishing pads. Trusted by top semiconductor manufacturers worldwide, our diverse selection ensures we have the perfect solution for your specific fabrication needs. Crafted with precision and tailored to meet the exacting standards, our pads are a testament to our commitment to quality and reliability. Trust in our experience to elevate your semiconductor fabrication processes to new heights of efficiency and performance.

AMG-5 POLISHING PAD

AMG-5 POLISHING PAD

FOR USE ON: Silicon, Sapphire and Silicon Carbide DUROMETER: C Scale 55 +/- 5,  D Scale 36 +/- 5 COMPRESSION %: 1.5-2.5% (1/2 lb. force displacement) DENSITY: .28-.32 g/cm3 THICKNESS: .050” / 1.27mm DIAMETER: Up To 60” Sheets or Pads   DESCRIPTION: Fibrous...

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Spartan Warrior Pad

Spartan Warrior Pad

FOR USE ON: The Spartan Warrior Pad is a versatile pad and can be used for most polishing applications by adjusting the polishing process variable parameter. HARDNESS (Scale C): 42 COMPRESSION %: 5% DENSITY: 0.326 g/cm3 THICKNESS: 0.050”-0.220” DIAMETER: Plain up to...

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Spartan OMNI-White Polishing Pad

Spartan OMNI-White Polishing Pad

FOR USE ON: Optical, electro-optical, metals, semiconductor, compound semiconductor and ceramic materials as a gentle stock removal pad or a final polishing pad. HARDNESS (Scale C): 55 - 60 COMPRESSION %: 11-13% DENSITY: 0.383-0.468 g/cm3 THICKNESS: 0.050”, 0.090”,...

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Spar-Lon 2

Spar-Lon 2

FOR USE ON: This final polishing pad can be used on sapphire, glass, plastics, ceramics, and metals with a variety of abrasive slurries. DUROMETER: 80º Shore A COMPRESSION %: 4% (2 pound Displacement) DENSITY: .0.40 g/cm3 THICKNESS: .050” +/- .001” DIAMETER: Up to 58”...

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Spartan Omni-Gray Polishing Pad

Spartan Omni-Gray Polishing Pad

FOR USE ON: Silicon, Sapphire and Silicon Carbide for the 1st step polishing application SURFACE OPTIONS: Plain, grooved, or embossed (up to 36”) COMPRESSION %: 10% DENSITY: 0.300 g/cm³ THICKNESS: 0.050”, 0.090”, 0.125” DIAMETER: up to 60”   DESCRIPTION: Spartan...

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AMG-5 POLISHING PAD

AMS Polishing Pad

FOR USE ON: Silicon Wafers, Cadmium Telluride, Gallium Arsenide, Stainless Steel, Sapphire, Silicon Carbide DUROMETER: Shore C Scale 60 COMPRESSION %: 4-6% (1/2 pound force displacement) DENSITY: .42 g/cm3 THICKNESS: .050", .090" and .125" DIAMETER: Up to 60" in...

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Poretex 2LN Polishing Pads

Poretex 2LN Polishing Pads

FOR USE ON: Used to produce ultra polished surfaces with synthetic padsNAP LENGTH: » 50 μWEIGHT: 570 +/50 grams/linear yd.COMPRESSION %: 4.5 +/2.0%DENSITY: 0.42 +/0.05 g/cm3THICKNESS: 450 +/80μ mmDIAMETER: Precut or 53” wide rolls   DESCRIPTION: In the surface...

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Spartan Durotex

Spartan Durotex

FOR USE ON: designed and manufactured to polish a wide variety of materials in a single-step type process including optics, electro-optics, semiconductor, aluminum discs, LCD/plasma display and ceramic compositions THICKNESS: 0.5 – 2.5mm DENSITY: 0.67 g/cm3 WIDTH: 400...

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HPC75 Polishing Pad

HPC75 Polishing Pad

FOR USE ON: Crystal and Medium Hardness Glass, Quartz, Stainless Steel DUROMETER: Shore C Scale 50 COMPRESSION %: 3-5% (1/2 pound force displacement) DENSITY: .33 g/cm3 THICKNESS: .050” DIAMETER: Up to 60” Sheets or Pads   DESCRIPTION: White or color fiber based...

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HPC5080 Polishing Pad

HPC5080 Polishing Pad

FOR USE ON: Hard Glass and Crystal DUROMETER: Shore C Scale 85 COMPRESSION %: 1-3% (1/2 pound force displacement) DENSITY: .85 g/cm3 THICKNESS: .045” DIAMETER: Up to 60” in Sheets or Pads   DESCRIPTION: Yellow color, fiber based resin treated polyurethane pad for...

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HPC4545 Polishing Pad

HPC4545 Polishing Pad

FOR USE ON: Silicon Wafers, Cadmium Telluride, Gallium Arsenide, Stainless Steel DUROMETER: Shore C Scale 55 COMPRESSION%: 3-5% (1/2 pound force displacement) DENSITY: .46 g/cm3 THICKNESS: .050” and .150” DIAMETER: Up to 60” in Sheets or Pads DESCRIPTION: White fiber...

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Corporate Headquarters

Spartan Felt
151 Felt Drive
Roebuck, South Carolina 29376

Phone – (864) 576-7919
Fax – (864) 574-4507