CMP and Semiconductor Polishing Pads
Spartan is renowned for our extensive range of CMP and semiconductor polishing pads. Trusted by top semiconductor manufacturers worldwide, our diverse selection ensures we have the perfect solution for your specific fabrication needs. Crafted with precision and tailored to meet the exacting standards, our pads are a testament to our commitment to quality and reliability. Trust in our experience to elevate your semiconductor fabrication processes to new heights of efficiency and performance.
Series 5200 Polishing Pad
FOR USE ON: Silicon Carbide DUROMETER: C Scale 60 +/- 5 points COMPRESSION %: 4% (1/2 lb. force displacement) DENSITY: 0.36 g/cm3 THICKNESS: .050” / 1.27mm DIAMETER: Up To 60” Sheets or Pads DESCRIPTION: Fibrous non-woven material with excellent surface wear...
HPB-101CC POLISHING PAD
FOR USE ON: Glass (All types), sapphire, silicon/semiconductor materials, silicon carbide, Ceramics, optics, plastics and some metals. DUROMETER: C Scale 40 +/- 5 points COMPRESSION %: 2-4% (4 lb. force displacement) DENSITY: 0.48 g/cm3 THICKNESS: .150” / 3.81mm...
AMG-5 POLISHING PAD
FOR USE ON: Silicon, Sapphire and Silicon Carbide DUROMETER: C Scale 55 +/- 5, D Scale 36 +/- 5 COMPRESSION %: 1.5-2.5% (1/2 lb. force displacement) DENSITY: .28-.32 g/cm3 THICKNESS: .050” / 1.27mm DIAMETER: Up To 60” Sheets or Pads DESCRIPTION: Fibrous...
EL1-KS POLISHING MATERIAL – New, More Durable, Premium Stock Removal Polishing Pad
FOR USE ON: Most Semiconductor, Compound Semi, Optic/Electro-Optic & Sapphire Applications DUROMETER (Scale C): 58 COMPRESSION %: 2% (1/2 lb. force displacement) DENSITY: .53 g/cm3 (25 lb.) THICKNESS: 0.050” DIAMETER: Up To 60” Sheets or Pads DESCRIPTION:...
Spartan Warrior Pad
FOR USE ON: The Spartan Warrior Pad is a versatile pad and can be used for most polishing applications by adjusting the polishing process variable parameter. HARDNESS (Scale C): 42 COMPRESSION %: 5% DENSITY: 0.326 g/cm3 THICKNESS: 0.050”-0.220” DIAMETER: Plain up to...
Spartan OMNI-White Polishing Pad
Spartan OMNI-White is a cross-functional polishing pad built to handle both stock removal and final surface generation in a single product — a fibrous, non-woven material with a textured gray surface and micro voids engineered for improved slurry distribution. Used as...
Spar-Lon 2
FOR USE ON: glass, semiconductors, compound semiconductors and infra-red materials DUROMETER: C Scale 60 COMPRESSION %: 2% (1/2 lb. force displacement) DENSITY: .485 g/cm3 THICKNESS: 0.050” DIAMETER: Up to 60” Sheets or Pads DESCRIPTION: Spartan Spar-Lon2; Tan...
Spartan Omni-Gray Polishing Pad
FOR USE ON: Silicon, Sapphire and Silicon Carbide for the 1st step polishing application SURFACE OPTIONS: Plain, grooved, or embossed (up to 36”) COMPRESSION %: 10% DENSITY: 0.300 g/cm³ THICKNESS: 0.050”, 0.090”, 0.125” DIAMETER: up to 60” DESCRIPTION: Spartan...
AMS Polishing Pad
FOR USE ON: Silicon Wafers, Cadmium Telluride, Gallium Arsenide, Stainless Steel, Sapphire, Silicon Carbide DUROMETER: Shore C Scale 60 COMPRESSION %: 4-6% (1/2 pound force displacement) DENSITY: .42 g/cm3 THICKNESS: .050", .090" and .125" DIAMETER: Up to 60" in...
Poretex 2LN Polishing Pads
Poretex 2LN is the main workhorse of our final polishing pads. It is a synthetic polishing pad designed specifically for producing ultra-polished surfaces, using a nap-length construction rather than a solid pad geometry. That makes it the right choice when your...
Spartan Durotex
FOR USE ON: designed and manufactured to polish a wide variety of materials in a single-step type process including optics, electro-optics, semiconductor, aluminum discs, LCD/plasma display and ceramic compositions THICKNESS: 0.5 – 2.5mm DENSITY: 0.67 g/cm3 WIDTH: 400...
HPC75 Polishing Pad
FOR USE ON: Crystal and Medium Hardness Glass, Quartz, Stainless Steel DUROMETER: Shore C Scale 50 COMPRESSION %: 3-5% (1/2 pound force displacement) DENSITY: .33 g/cm3 THICKNESS: .050” DIAMETER: Up to 60” Sheets or Pads DESCRIPTION: White or color fiber based...
HPC5080 Polishing Pad
FOR USE ON: Hard Glass and Crystal DUROMETER: Shore C Scale 85 COMPRESSION %: 1-3% (1/2 pound force displacement) DENSITY: .85 g/cm3 THICKNESS: .045” DIAMETER: Up to 60” in Sheets or Pads DESCRIPTION: Yellow color, fiber based resin treated polyurethane pad for...
HPC4545 Polishing Pad
FOR USE ON: Silicon Wafers, Cadmium Telluride, Gallium Arsenide, Stainless Steel DUROMETER: Shore C Scale 55 COMPRESSION%: 3-5% (1/2 pound force displacement) DENSITY: .46 g/cm3 THICKNESS: .050” and .150” DIAMETER: Up to 60” in Sheets or Pads DESCRIPTION: White fiber...
